Joshua Frederick
at Micron Technology Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524
KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis

Proceedings Article | 27 April 2023 Presentation + Paper
Nick Keller, Zhuo Chen, Peter Wang, Rostislav Grynko, Troy Ribaudo, G. Andrew Antonelli, Youcheng Wang, Joshua Frederick, Sadao Takabayashi, John Hauck, Dan Engelhard
Proceedings Volume 12496, 124961Z (2023) https://doi.org/10.1117/12.2657719
KEYWORDS: Simulations, Metals, Finite-difference time-domain method, 3D acquisition, 3D metrology, Semiconducting wafers, Etching, Electric fields, Dielectrics, Plasmonics

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530T (2022) https://doi.org/10.1117/12.2618035
KEYWORDS: Silicon, Etching, Metrology, Semiconducting wafers, Mid-IR, Diffractive optical elements, Silica, Scattering, Critical dimension metrology, Absorption

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

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