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Ke-Min Liao
PhD Student at National Tsing Hua Univ
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Publications (4)
SPIE Journal Paper | 1 July 2008
Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer
Ke-Min Liao, Rongshun Chen
JM3, Vol. 7, Issue 03, 033011, (July 2008) https://doi.org/10.1117/12.10.1117/1.2959849
KEYWORDS: Sensors, Liquids, Temperature sensors, Prototyping, Microfluidics, Computing systems, Signal detection, Resistors, Physics, Temperature metrology
SPIE Journal Paper | 1 October 2005
Closed-loop adaptive control for electrostatically driven torsional micromirrors
Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh, Rongshun Chen
JM3, Vol. 4, Issue 04, 041503, (October 2005) https://doi.org/10.1117/12.10.1117/1.2110145
KEYWORDS: Micromirrors, Adaptive control, Capacitance, Device simulation, Electrodes, Control systems, Microopto electromechanical systems, Mirrors, Surface micromachining, Modulation
Proceedings Article | 24 January 2004 Paper
Closed-loop adaptive control for torsional micromirrors
Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh, Rongshun Chen
Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524691
KEYWORDS: Micromirrors, Adaptive control, Electrodes, Capacitance, Device simulation, Sensors, Feedback signals, Mirrors, Control systems, Surface micromachining
Proceedings Article | 21 January 2003 Paper
Fabrication of micromachined focusing mirrors with seamless reflective surface
Max Ti-Kuang Hou, Ke-Min Liao, Hong-Zhen Yeh, Bo-Wen Cheng, Pei-Yuan Hong, Rongshun Chen
Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472909
KEYWORDS: Mirrors, Micromirrors, Reflectivity, Temperature metrology, Spherical lenses, Interferometers, Microopto electromechanical systems, Optical benches, Failure analysis, Head
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