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Kwangwoo Kim

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Analysis software development for optical critical dimension based on RCWA and 3D modeling

Jiwon Lee, Minhyeok Lee, Shinyoung Ryu, Kwangwoo Kim, Jongjeong Kim, Tae Dong Kang

Proceedings Volume 12955, 129553U (2024) https://doi.org/10.1117/12.3022262

KEYWORDS: 3D modeling, 3D applications, Semiconductors, Deep learning, Metrology, Algorithm development, Mathematical optimization, Evolutionary algorithms, 3D metrology, Software development

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