Mr. Minhyeok Lee Profile

Minhyeok Lee

at AUROS Technology, Inc.

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Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Analysis software development for optical critical dimension based on RCWA and 3D modeling

Jiwon Lee, Minhyeok Lee, Shinyoung Ryu, Kwangwoo Kim, Jongjeong Kim, Tae Dong Kang

Proceedings Volume 12955, 129553U (2024) https://doi.org/10.1117/12.3022262

KEYWORDS: 3D modeling, 3D applications, Semiconductors, Deep learning, Metrology, Algorithm development, Mathematical optimization, Evolutionary algorithms, 3D metrology, Software development

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Proceedings Article | 27 April 2023 Poster + Paper

Fourier analysis of spectrum for precision improvement in thickness determined by machine learning

Moon Il Shin, Inhee Joh, Sayyeon Joung, Jiwon Lee, Minhyeok Lee, Kyusik Kim, Shinyoung Ryu, Tae Dong Kang

Proceedings Volume 12496, 124962I (2023) https://doi.org/10.1117/12.2657792

KEYWORDS: Reflectivity, Oxides, Data modeling, Fourier transforms, Film thickness, Machine learning, Education and training, Performance modeling, Spectral response, Mathematical optimization

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