Dr. Lifei Sun Profile

Dr. Lifei Sun

at Coventor Inc A Lam Research Co

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Qingpeng Wang, Yu Jia Zhong, Timothy Yang, Lifei Sun, Pengfei Lyu, Benjamin Vincent, Ivan Chakarov, Joseph Ervin

Proceedings Volume 12954, 129541D (2024) https://doi.org/10.1117/12.3010206

KEYWORDS: Line edge roughness, Etching

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Keywords/Phrases