Dr. Qingpeng Wang Profile

Dr. Qingpeng Wang

at Lam Research China

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

A study of bitline contact process variation on DRAM performance and DVC/BVC failures using virtual fabrication

Yujia Zhong, Qingpeng Wang, Dempsey Deng, Benjamin Vincent, Joseph Ervin

Proceedings Volume 12954, 129541G (2024) https://doi.org/10.1117/12.3010213

KEYWORDS: Critical dimension metrology, Etching, Diffractive optical elements, Fabrication, Windows, Cadmium, Silicon, Resistance, Virtual reality, Tolerancing

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Proceedings Article | 10 April 2024 Poster + Paper

Improving line edge roughness using virtual fabrication

Qingpeng Wang, Yu Jia Zhong, Timothy Yang, Lifei Sun, Pengfei Lyu, Benjamin Vincent, Ivan Chakarov, Joseph Ervin

Proceedings Volume 12954, 129541D (2024) https://doi.org/10.1117/12.3010206

KEYWORDS: Line edge roughness, Etching

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Proceedings Article | 25 May 2022 Presentation + Paper

Gaining insight into critical dimension sensitivity and uniformity in an SADP based advanced DRAM cut process using virtual fabrication

Qingpeng Wang, Benjamin Vincent, Joseph Ervin

Proceedings Volume 12055, 120550M (2022) https://doi.org/10.1117/12.2613613

KEYWORDS: Critical dimension metrology, Line edge roughness, Diffractive optical elements, Cadmium, Semiconducting wafers, Overlay metrology, Head, Silicon, Metrology, Virtual reality

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