Ms. María Villarroya-Gaudo Profile

María Villarroya-Gaudo

Physics Bachelor at Univ Autònoma de Barcelona

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Publications (2)

Proceedings Article | 1 July 2005 Paper

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

Maria Villarroya, Jaume Verd, Jordi Teva, Gabriel Abadal, Eduard Figueras, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608354

KEYWORDS: Sensors, Microelectromechanical systems, Transducers, Photomasks, CMOS sensors, Reactive ion etching, Optical lithography, Readout integrated circuits, Integrated circuit design, Integrated circuits

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Proceedings Article | 24 April 2003 Paper

SOI silicon as structural layer for NEMS applications

Maria Villarroya, Eduard Figueras, Francesc Perez-Murano, Francesca Campabadal, Jaume Esteve, Nuria Barniol

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499010

KEYWORDS: Silicon, Semiconducting wafers, Oxides, Photomasks, Sensors, Aluminum, Nanoelectromechanical systems, Nanofabrication, Etching, Nanolithography

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