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Maurice Delafosse
at Digitho Technologies Inc.
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Publications (2)
Proceedings Article | 22 November 2023 Poster
Programmable photomask for photolithography systems
Richard Beaudry, Iftekharul Islam, Amrid Amnache, Maurice Delafosse, Luc Fréchette
Proceedings Volume PC12751, PC1275111 (2023) https://doi.org/10.1117/12.2685212
KEYWORDS: Photomasks, Lithography, Prototyping, Overlay metrology, Optical lithography, Semiconductor manufacturing, Printing
Proceedings Article | 21 November 2023 Poster + Paper
Programmable photomask for photolithography systems
Richard Beaudry, Md. Iftekharul Islam, Amrid Amnache, Maurice Delafosse, Luc Fréchette
Proceedings Volume 12751, 1275111 (2023) https://doi.org/10.1117/12.2685213
KEYWORDS: Photomasks, Lithography, Optical lithography, Semiconductor manufacturing, Prototyping, Printing, Overlay metrology
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