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Dr. Muharrem Bayraktar
at Univ Twente
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Publications (4)
SPIE Journal Paper | 22 September 2020
High-power EUV lithography: spectral purity and imaging performance
JM3, Vol. 19, Issue 03, 033801, (September 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.033801
Proceedings Article | 23 March 2020 Paper
Spectral purity performance of high-power EUV systems
Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen, Xueqing Zhang, Robert de Kruif, Natalia Davydova, Guido Schiffelers, Felix Wählisch, Eelco van Setten, Wouter Varenkamp, Kees Ricken, Laurens de Winter, John McNamara, Muharrem Bayraktar
Proceedings Volume 11323, 1132321 (2020) https://doi.org/10.1117/12.2551021
KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Extreme ultraviolet lithography, Reflectivity, Reticles, Imaging systems, Scanners
Proceedings Article | 11 February 2010 Paper
Holographic recording without a separate reference wave
Proceedings Volume 7619, 76190K (2010) https://doi.org/10.1117/12.840712
KEYWORDS: Holograms, Holography, Beam splitters, Charge-coupled devices, 3D image reconstruction, Single mode fibers, Diffraction, Light sources, Digital holography, Cameras
Proceedings Article | 3 February 2009 Paper
Digital holography image reconstruction methods
Proceedings Volume 7233, 72330B (2009) https://doi.org/10.1117/12.808835
KEYWORDS: Holograms, Convolution, Diffraction, 3D image reconstruction, Fourier transforms, Digital holography, Holography, Computing systems, Near field diffraction, Image restoration
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