Prof. Naotaka Iwata Profile

Prof. Naotaka Iwata

at Toyota Technological Institute

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Publications (1)

Proceedings Article | 8 March 2024 Poster + Paper

ArF excimer laser activation of Mg-doped GaN small area mesa device

Maria Emma Villamin, Ronel Christian Roca, Itaru Kamiya, Naotaka Iwata

Proceedings Volume 12886, 128860F (2024) https://doi.org/10.1117/12.3002082

KEYWORDS: Laser irradiation, Annealing, Gallium nitride, Excimer lasers, Semiconducting wafers, Atomic force microscopy, Ultraviolet radiation, Sapphire, Resistance, Pulsed laser operation

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