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Dr. Pau Guell
at imec
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Author
Publications (1)
Proceedings Article | 1 May 2023 Presentation + Paper
High transfer fidelity via nanoimprint lithography of patterns for bioelectronics applications
P. Güell-Grau, M. Asbahi, S. Smout, M. Willegems, B. Kotowska, M. Traub, S. Lenci, E. Storace, S. Severi
Proceedings Volume 12497, 124970C (2023) https://doi.org/10.1117/12.2657991
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Critical dimension metrology, Etching, Design and modelling, Fabrication, Scanning electron microscopy, Lithography, Wet etching, Silicon
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