CONFERENCE PROCEEDINGS
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Steve Smout
at imec
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Publications (3)
Proceedings Article | 7 August 2023 Presentation
Nanoimprint-based pattern transfer to 300 mm substrates
Matthew Traub, Myriam Willegms, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace
Proceedings Volume 12624, 126240E (2023) https://doi.org/10.1117/12.2675915
KEYWORDS: Optical lithography, Semiconducting wafers, Nanoimprint lithography, Metrology, Manufacturing, Flat optics, Etching, Dielectrics, Deep ultraviolet
Proceedings Article | 1 May 2023 Presentation + Paper
High transfer fidelity via nanoimprint lithography of patterns for bioelectronics applications
P. Güell-Grau, M. Asbahi, S. Smout, M. Willegems, B. Kotowska, M. Traub, S. Lenci, E. Storace, S. Severi
Proceedings Volume 12497, 124970C (2023) https://doi.org/10.1117/12.2657991
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Critical dimension metrology, Etching, Design and modelling, Fabrication, Scanning electron microscopy, Lithography, Wet etching, Silicon
Proceedings Article | 16 March 2023 Presentation + Paper
Scalable patterning modules for diffractive optics on 300mm substrates
Matthew Traub, Myriam Willegems, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace
Proceedings Volume 12449, 1244904 (2023) https://doi.org/10.1117/12.2649739
KEYWORDS: Semiconducting wafers, Glasses, Optical lithography, Silicon, Silicon nitride, Nanoimprint lithography, Etching, Fabrication, Electron beam lithography, Deep ultraviolet
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