To meet the requirement of high precision measurement for high aspect ratio microstructures, a contact trigger probe based on optical lever is designed in this paper. An elastic mechanism, which is composed of a tungsten stylus, a cross shaped leaf springs, a floating plate and a mirror is used to transmitted displacement of the probe tip. An optical lever principle is used to amplify the angle offset to improve the sensitivity. The four quadrant detector is be adopted to detection light spot displacement, And the micro adjustment mechanism adjusts the position of the four quadrant sensor to make the measurement in the linear range. When the probe is triggered in different directions, the light spot will pass through multiple mirrors and produce double angle offset amplification, Through the plane mirror group, the light beam passes through the floating plate twice to realize the secondary amplification of the angle, it causes the light spot on the four quadrant detector to shift. The measurement accuracy is greatly improved. The experimental results show that the resolution of the probe in all directions is better than 1nm, and the maximum resolution in x-axis direction is 0.1nm.
A compact measurement system to measure four-degree-of-freedom (4-DOF) geometric errors of machine tools is presented in this paper. The angular errors and the straightness errors of the machine tools can be detected simultaneously by only one single laser beam, one position-sensitive detector (PSD) and one four-quadrant photodetector (QPD) through a simple optical configuration. The 4-DOF system has been calibrated and an API XD laser system is used as a reference. The straightness and angular measurement range of the system are ± 100 μm and ± 200 arc-sec, respectively. The resolution of straightness and angle measurement is 0.1 μm and 0.5 arc-sec, respectively. The developed measurement system was assembled on a machine tool with a carrier platform which has been moved 800 mm with an interval of 50 mm. A similar measurement was also conducted by the API XD laser system. The measuring results show that the maximum straightness residual is less than 2 μm and the maximum angular residual is less than 2 arc-sec. The experimental results show that the system have a straightness repeatability of ± 2 μm and an angular repeatability of ± 2 arc-sec. The developed 4-DOF measurement system can be easily assembled for geometric error measurement of machine tools in the industrial fields.
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