Mr. Rainer L. Pelzer Profile

Rainer L. Pelzer

Technical Management at EV Group

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Author

Publications (3)

Proceedings Article | 23 January 2006 Paper

Optical module fabrication using nanoimprint technology

Markus Rossi, Hartmut Rudmann, Susanne Westenhöfer, Martin Salt, Rainer Pelzer

Proceedings Volume 6110, 61100L (2006) https://doi.org/10.1117/12.646520

KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Semiconducting wafers, Nanotechnology, Lithography, Wafer-level optics, Nanolithography, Optical components, Optical alignment, Telecommunications

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Proceedings Article | 23 February 2005 Paper

Nanoimprint lithography: full wafer replication of nanometer features

Rainer Pelzer, Cecile Gourgon, Stefan Landis, Paul Kettner

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.582435

KEYWORDS: Polymers, Semiconducting wafers, Nanoimprint lithography, Ultraviolet radiation, Polymethylmethacrylate, Lithography, Glasses, Silicon, Microelectronics, Optical alignment

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Proceedings Article | 20 May 2004 Paper

Nanostructuring of polymers by hot embossing lithography

Hella-Christin Scheer, Thomas Glinsner, Matthias Wissen, Rainer Pelzer

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535741

KEYWORDS: Polymers, Lithography, Nanoimprint lithography, Glasses, Nanostructuring, Scanning electron microscopy, Manufacturing, Nanotechnology, Optical alignment, Visible radiation

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