Dr. Roy Knechtel Profile

Dr. Roy Knechtel

Project Manager/MEMS Process Development at X FAB Semiconductor Foundries AG

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 21 May 2015 Paper

3D integration approaches for MEMS and CMOS sensors based on a Cu through-silicon-via technology and wafer level bonding

L. Hofmann, S. Dempwolf, D. Reuter, R. Ecke, K. Gottfried, S. Schulz, R. Knechtel, T. Geßner

Proceedings Volume 9517, 951709 (2015) https://doi.org/10.1117/12.2178598

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Wafer bonding, Glasses, Copper, Etching, CMOS technology, Sensors, Metals, Silicon

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Proceedings Article | 19 May 2009 Paper

Single crystalline silicon-based surface micromachining for high-precision inertial sensors: technology and design for reliability

Roy Knechtel

Proceedings Volume 7362, 73620O (2009) https://doi.org/10.1117/12.821643

KEYWORDS: Reliability, Semiconducting wafers, Glasses, Sensors, Silicon, Wafer bonding, Gyroscopes, Surface micromachining, Microelectromechanical systems, Metals

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Proceedings Article | 11 August 2000 Paper

Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy

W. Merlijn van Spengen, Ingrid De Wolf, Roy Knechtel

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395600

KEYWORDS: Raman spectroscopy, Silicon, Sensors, Semiconducting wafers, Micro raman spectroscopy, Microelectromechanical systems, Phonons, Raman scattering, Light scattering, Crystals

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Conference Committee Involvement (4)

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VI

24 April 2013 | Grenoble, France

Smart Sensors, Actuators and MEMS

18 April 2011 | Prague, Czech Republic

Smart Sensors, Actuators and MEMS

4 May 2009 | Dresden, Germany

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