Mr. Thomas Overstolz Profile

Thomas Overstolz

at Univ de Neuchâtel

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Publications (2)

Proceedings Article | 21 April 2006 Paper

Compact and stress-released piston tip-tilt mirror

W. Noell, T. Overstolz, R. Stanley, N. de Rooij

Proceedings Volume 6186, 61860H (2006) https://doi.org/10.1117/12.666511

KEYWORDS: Mirrors, Oxides, Beam shaping, Electrodes, Microtechnology, Actuators, Adaptive optics, Optical lithography, Deep reactive ion etching, Interferometers

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Proceedings Article | 16 August 2004 Paper

MEMS tunable filter for telecom applications

Thomas Overstolz, Guido Niederer, Wilfried Noell, Michael Gale, Hans Peter Herzig, Samuel Obi, Hans Thiele, Nicolaas de Rooij

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545581

KEYWORDS: Optical filters, Microelectromechanical systems, Actuators, Waveguides, Electrodes, Silicon, Deep reactive ion etching, Polarization, Capacitors, Etching

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