Dr. Tomoya Nakamura Profile

Dr. Tomoya Nakamura

at SANKEN, Osaka Univ.

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Publications (1)

Proceedings Article | 21 November 2023 Poster + Paper

Automatic evaluation of line-and-space resist patterns with defects using image recognition technology

Yuqing Jin, Takahiro Kozawa, Kota Aoki, Tomoya Nakamura, Yasushi Makihara, Yasushi Yagi

Proceedings Volume 12750, 1275015 (2023) https://doi.org/10.1117/12.2685766

KEYWORDS: Hough transforms, Scanning electron microscopy, Pattern recognition, Monte Carlo methods, Photoresist processing, Image filtering, Image analysis, Extreme ultraviolet, Chemical analysis, Tunable filters

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