In this paper we demonstrate the development and optimization of an 800 nm-thick Plasma-enhanced chemical vapor deposition (PECVD) silicon nitride (SiN) photonic platform on a 300-mm silicon wafer. The implementation of ArF immersion lithography contributes to superior manufacturing processes, as it provides excellent critical dimension (CD) uniformity inter- and intra-wafers, make it an optimal platform of production of integrated circuits and nanoscale devices.
On-chip spectrometer operating in the mid-infrared (MIR) regime (λ = 2 – 14 μm) enables the miniaturization of a chemical sensing platform that identifies compounds based on their unique molecular fingerprints. Germanium-on-Silicon (Ge-on- Si) material system is a suitable candidate for its transparency in the MIR spectrum and compatibility with silicon processing. As chemical sensing is conducted by having the mode evanescent field interacting with the analyte, the design of Ge-on-Si waveguide for a compact footprint (small bending radius) and large evanescent field coverage is necessary. However, the bending radius of the Ge-on-Si waveguide is limited to hundreds of micrometers due to the low refractive index contrast between germanium and silicon. In this work, we demonstrate a 3 μm thick Ge-on-Si waveguide, with ~89° sidewall angles and a high gap aspect ratio of 10 (resolvable gaps of 300 nm). Different types of Ge-on-Si devices are fabricated including in-plane distributed Bragg grating (DBR) structures, cascaded Fabry-Perot resonators, and polarization splitters. We show that over-etching the Si lower cladding is able to reduce bending loss by ~10x, allowing us to decrease the bending radius to ~50 μm. Designs of 32 waveguide geometries for single mode propagation from 5.5 μm to 11 μm are presented, each of which is integrated with grating couplers operating at specific peak wavelengths. Our measurements show high consistency between the simulated and measured peak wavelengths of the grating couplers, with an inter-chip standard deviation of σλ ⁄ λpeak <1%
Aluminum nitride (AlN) is a promising photonics material contributed by its wide transparency window and remarkable nonlinear optical property. Moreover, its nonlinear effect can be further enhanced by doping Scandium (Sc). Such nonlinear optical property brings potential for high efficiency in nonlinear optical generation processes, such as 2nd harmonic generation and frequency comb generation. Although the nonlinear optical property of Sc-doped AlN looks promising, its waveguide is facing challenge on loss reduction. In this work, we report Sc-doped AlN photonic integrated circuit with reduced waveguide loss of 6 dB/cm around 1550 nm. The waveguide has Sc doping concentration of 10%. Its etching process is tailored through a design of experiment (DoE) approach to achieve smooth surface. An annealing process is also applied to patterned waveguide for optical loss reduction. A loaded Q of 1.41×104 has also been reported from microring resonator on the same wafer. The reported result paves the way towards low-loss Sc-doped AlN for photonic integrated circuits.
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