Dr. Yoshitaro Sakata Profile

Dr. Yoshitaro Sakata

at AIST

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Publications (3)

Proceedings Article | 4 March 2019 Paper

Development of separation inspection technique for micro-cracks and particles using non-contact stress-induced light scattering method

Yoshitaro Sakata, Nao Terasaki

Proceedings Volume 10925, 1092519 (2019) https://doi.org/10.1117/12.2508375

KEYWORDS: Particles, Glasses, Temperature metrology, Inspection, Light scattering, Surface finishing, Manufacturing, Polishing, Refractive index, CCD cameras

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Proceedings Article | 15 March 2016 Paper

Ellipsometry-like analysis of polarization state for micro cracks using stress-induced light scattering method

Yoshitaro Sakata, Nao Terasaki, Kazufumi Sakai, Kazuhiro Nonaka

Proceedings Volume 9754, 97541C (2016) https://doi.org/10.1117/12.2213686

KEYWORDS: Glasses, Surface finishing, Light scattering, Polishing, Polarization, Chemical mechanical planarization, Manufacturing, Inspection, Chemical analysis, Liquid crystals, Particles, Refractive index, CCD cameras, Reflection

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Proceedings Article | 1 May 2014 Paper

Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering method

Yoshitaro Sakata, Kazufumi Sakai, Kazuhiro Nonaka

Proceedings Volume 9132, 913209 (2014) https://doi.org/10.1117/12.2052046

KEYWORDS: Light scattering, Glasses, Surface finishing, Particles, Polishing, Inspection, Refractive index, CCD cameras, Actuators, Chemical mechanical planarization

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