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Aodong He
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Publications (2)
Proceedings Article | 24 January 2013 Paper
Optical emission spectroscopy analysis for Ge2Sb2Te5 etching endpoint detection in HBr/He plasma
Juntao Li, Bo Liu, Zhitang Song, Gaoming Feng, Guanping Wu, Aodong He, Zuoya Yang, Nanfei Zhu, Jia Xu, Jiadong Ren, Songlin Feng
Proceedings Volume 8782, 87820L (2013) https://doi.org/10.1117/12.2018658
KEYWORDS: Etching, Plasma, Bromine, Signal detection, Emission spectroscopy, Interfaces, Process control, Scanning electron microscopy, Signal processing, Optical lithography
Proceedings Article | 24 January 2013 Paper
Chemical mechanical planarization of amorphous Ge2Sb2Te5 using KClO4 as oxidizer in acidic slurry
Aodong He, Zhitang Song, Bo Liu, Min Zhong, Weili Liu, Liangyong Wang, Weixia Yan, Yu Lei, Guanping Wu
Proceedings Volume 8782, 87820Y (2013) https://doi.org/10.1117/12.2015253
KEYWORDS: Chemical mechanical planarization, Germanium, Antimony, Tellurium, Etching, Chemical elements, Resistance, Polishing, Corrosion, Temperature metrology
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