Unspecified Dongsuk Lim Profile

Dongsuk Lim

at SK Hynix Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Effective tool induced shift (eTIS) for determining the total measurement uncertainty (TMU) in overlay metrology

Hyunsok Kim, Ikhyun Jeong, Baikkyu Hong, Sejung Ham, Dongsu Kim, Dongsuk Lim, Kangmin Lee, Jeongpyo Lee, Minho Jung, Nanglyeom Oh, Dongsub Choi, Hedvi Spielberg, Ohad Bachar

Proceedings Volume 12496, 124963O (2023) https://doi.org/10.1117/12.2670420

KEYWORDS: Semiconducting wafers, Metrology, Calibration, Overlay metrology, Measurement uncertainty, Optical parametric oscillators, Advanced process control, Time metrology, Reproducibility, Optical lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years