Dr. Haizhou Yin Profile

Dr. Haizhou Yin

at Siemens EDA

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Machine learning (ML) based SEM contour extraction accelerated by GPU for etch modeling application

Yuansheng Ma, Xuefeng Zeng, Yunxiang Wang, Haizhou Yin, Xiaoyuan Qi, Shibing Wang, Le Hong

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012442

KEYWORDS: Scanning electron microscopy, Contour extraction, Modeling, Etching, Machine learning, Metrology, Data modeling, Contour modeling, Semiconductors, Industry

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