I-Yun Liu
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 129580L (2024) https://doi.org/10.1117/12.3012753
KEYWORDS: Etching, Chemistry, Gases, Silica, Sustainability, Optical lithography, Fluorine, Dry etching, Climate change, Semiconducting wafers

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