Dr. Il Gyo Koo Profile

Dr. Il Gyo Koo

at imec

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Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Patterning spacer source drain cavities in CFET devices

S. Choudhury, G. Mannaert, L. P. Lima, S. Demuynck, I. Koo, F. Lazzarino

Proceedings Volume 12958, 1295805 (2024) https://doi.org/10.1117/12.3013077

KEYWORDS: Etching, Optical lithography, Silicon, Passivation, Dielectrics, Superlattices, Nanosheets, Cadmium, Field effect transistors, Chemistry

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Proceedings Article | 9 April 2024 Presentation + Paper

Active area patterning for CFET: nanosheet etch

V. Brissonneau, Il Gyo Koo, M. Hosseini, D. Batuk, A. Veloso, G. Mannaert, F. Lazzarino

Proceedings Volume 12958, 1295804 (2024) https://doi.org/10.1117/12.3012322

KEYWORDS: Silicon, Etching, Optical lithography, Nanosheets, Passivation, Semiconducting wafers, Superlattices, Germanium, Oxides, Fin field effect transistors

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