Dr. Nathan J. Brooks Profile

Dr. Nathan J. Brooks

at JILA

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Publications (3)

Proceedings Article | 30 April 2023 Presentation

High-fidelity actinic ptychographic imaging of EUV photomasks enabled by illumination engineering

Bin Wang, Nathan Brooks, Iona Binnie, Michael Tanksalvala, Yuka Esashi, Nicholas Jenkins, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12496, 124960A (2023) https://doi.org/10.1117/12.2670528

KEYWORDS: Metrology, Light sources, Extreme ultraviolet, Photomasks, Illumination engineering, Diffraction, Signal processing, Phase shift keying, Light sources and illumination, Beam divergence

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Proceedings Article | 17 March 2023 Presentation

Single-frame characterization and nonlinear conversion of ultrafast vortex pulses carrying spatiotemporal orbital angular momentum

Chen-Ting Liao, Guan Gui, Nathan Brooks, Bin Wang, Henry Kapteyn, Margaret Murnane

Proceedings Volume PC12436, PC1243607 (2023) https://doi.org/10.1117/12.2649114

KEYWORDS: Ultrafast phenomena, Spiral phase plates, Nonlinear crystals, Structured light, Second-harmonic generation, Refraction, Photonics, Photonic crystals, Phase velocity, Optical vortices

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Proceedings Article | 1 December 2022 Presentation + Paper

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Bin Wang, Nathan Brooks, Michael Tanksalvala, Yuka Esashi, Nicolas Jenkins, Peter Johnsen, Iona Binnie, Guan Gui, YunZhe Shao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726

KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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