Mr. Shengxun Zhao Profile

Shengxun Zhao

at Kla China

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Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper

Machine learning robustness in overlay metrology

Udi Shusterman, Grechin Sveta, Boaz Ophir, Cindy Kato, Masanobu Hayashi, Shengxun Zhao, Jiehong Ng, Tomohiro Goto, Atsushi Imada, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi

Proceedings Volume 12496, 124960M (2023) https://doi.org/10.1117/12.2657438

KEYWORDS: Semiconducting wafers, Education and training, Data modeling, High volume manufacturing, Overlay metrology, Machine learning, 3D modeling, Metrology, Performance modeling, Object detection

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