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Shengxun Zhao
at Kla China
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Publications (1)
Proceedings Article | 27 April 2023 Presentation + Paper
Machine learning robustness in overlay metrology
Udi Shusterman, Grechin Sveta, Boaz Ophir, Cindy Kato, Masanobu Hayashi, Shengxun Zhao, Jiehong Ng, Tomohiro Goto, Atsushi Imada, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi
Proceedings Volume 12496, 124960M (2023) https://doi.org/10.1117/12.2657438
KEYWORDS: Semiconducting wafers, Education and training, Data modeling, High volume manufacturing, Overlay metrology, Machine learning, 3D modeling, Metrology, Performance modeling, Object detection
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