Mr. Udi Shusterman Profile

Udi Shusterman

at KLA

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Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper

Machine learning robustness in overlay metrology

Udi Shusterman, Grechin Sveta, Boaz Ophir, Cindy Kato, Masanobu Hayashi, Shengxun Zhao, Jiehong Ng, Tomohiro Goto, Atsushi Imada, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi

Proceedings Volume 12496, 124960M (2023) https://doi.org/10.1117/12.2657438

KEYWORDS: Semiconducting wafers, Education and training, Data modeling, High volume manufacturing, Overlay metrology, Machine learning, 3D modeling, Metrology, Performance modeling, Object detection

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Proceedings Article | 22 February 2021 Presentation + Paper

Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study

Boaz Ophir, Udi Shusterman, Anna Golotsvan, Cindy Kato, Masanobu Hayashi, Richika Kato, Tomohiro Goto, Taketo Kuriyama, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi

Proceedings Volume 11611, 116110E (2021) https://doi.org/10.1117/12.2590247

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Proceedings Article | 20 March 2020 Paper

Machine learning for Tool Induced Shift (TIS) reduction

Shlomit Katz, Boaz Ophir, Udi Shusterman, Anna Golotsvan, Liran Yerushalmi, Efi Megged, Yoav Grauer, Jian Zhang, Alimei Shih, Shi-Ming Wei, Judith Yep, Fiona (Shuk Fan) Leung, Pek Beng Ong

Proceedings Volume 11325, 113252C (2020) https://doi.org/10.1117/12.2550747

KEYWORDS: Semiconducting wafers, Overlay metrology, Machine learning, Metrology, Data modeling, 3D modeling, Performance modeling

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